Analytical and Experimental Study of the Dynamics of a Micro-Electromechanical Resonator Based Digital-to-Analog Converter

Abstract In this paper, an analytical model of a micro-electromechanical (MEM) resonator used as 4-bit digital-to-analog converter (DAC) is presented. First, we derive the dynamic equation DAC device, and nonlinear governing solved by Galerkin method combined with shooting technique to simulate static response, linear eigenvalue problem, forced vibration response device for various electrostatic actuation cases. Also, optimize air gaps in domain ensure enhanced performance DAC. Further, analyze operation regime, two experimental samples powered ?2 dBm ?12 AC inputs are examined. Forward backward frequency sweeps conducted experimentally analytically. The proposed results validated comparison data. indicate that presented modeling, simulations, optimization effective tools design MEM resonator-based circuits.